JPH0372956B2 - - Google Patents
Info
- Publication number
- JPH0372956B2 JPH0372956B2 JP172184A JP172184A JPH0372956B2 JP H0372956 B2 JPH0372956 B2 JP H0372956B2 JP 172184 A JP172184 A JP 172184A JP 172184 A JP172184 A JP 172184A JP H0372956 B2 JPH0372956 B2 JP H0372956B2
- Authority
- JP
- Japan
- Prior art keywords
- surface plate
- base body
- base
- magnetic
- ceramic powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000919 ceramic Substances 0.000 claims description 29
- 230000005291 magnetic effect Effects 0.000 claims description 22
- 239000000843 powder Substances 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 13
- 229910052751 metal Inorganic materials 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 10
- 239000011148 porous material Substances 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 7
- 239000006260 foam Substances 0.000 claims description 3
- 230000005389 magnetism Effects 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 239000004575 stone Substances 0.000 description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 4
- 229910010293 ceramic material Inorganic materials 0.000 description 4
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 238000005187 foaming Methods 0.000 description 1
- 239000010438 granite Substances 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000006262 metallic foam Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
Landscapes
- Powder Metallurgy (AREA)
- Manufacture Of Alloys Or Alloy Compounds (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP172184A JPS60144689A (ja) | 1984-01-09 | 1984-01-09 | 定盤およびその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP172184A JPS60144689A (ja) | 1984-01-09 | 1984-01-09 | 定盤およびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60144689A JPS60144689A (ja) | 1985-07-31 |
| JPH0372956B2 true JPH0372956B2 (en]) | 1991-11-20 |
Family
ID=11509426
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP172184A Granted JPS60144689A (ja) | 1984-01-09 | 1984-01-09 | 定盤およびその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60144689A (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005027206A1 (ja) * | 2003-09-11 | 2005-03-24 | Nikon Corporation | 定盤、ステージ装置及び露光装置 |
-
1984
- 1984-01-09 JP JP172184A patent/JPS60144689A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60144689A (ja) | 1985-07-31 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |